a PSFs obtained using a remote mirror with three steps and a sinusoidal scan motion generated by a resonant galvanometer mirror driven at 12 kHz. b Scanning over the same step mirror with a sinusoidal scan motion whose amplitude was adjusted to yield evenly illuminated laser foci. c Sinusoidal scan motion over a planar mirror inclined by 7.5°. d Same arrangement as in c, but with a threefold increased scanning amplitude and a mask to truncate the scan range optically. e Axial intensity profiles of the beams shown in c and d. XZ maximum intensity projections of transmission data are shown in a–d. Scale bar: 10 µm
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